Vacuum tube electron microscope

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United States of America Patent

PATENT NO 9859097
SERIAL NO

15224167

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Abstract

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A permanently sealed vacuum tube is used to provide the electrons for an electron microscope. This advantageously allows use of low vacuum at the sample, which greatly simplifies the overall design of the system. There are two main variations. In the first variation, imaging is provided by mechanically scanning the sample. In the second variation, imaging is provided by point projection. In both cases, the electron beam is fixed and does not need to be scanned during operation of the microscope. This also greatly simplifies the overall system.

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Patent Owner(s)

Patent OwnerAddress
THE UNIVERSITY OF BRITISH COLUMBIAVANCOUVER BC V6T 1Z3

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cybulski, James Stanley Stanford, US 4 8
Nojeh, Alireza Vancouver, CA 3 4
Pease, R Fabian W Stanford, US 16 799
Prakash, Manu San Francisco, US 27 238

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