Fast swap dual substrate transport for load lock

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United States of America Patent

PATENT NO 9859140
SERIAL NO

13561873

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Abstract

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A load lock is provided for a semiconductor substrate processing system having a transport robot mounted therein. The load lock transport supplies substrates directly to a processing chamber without the need for a central transport robot. The load lock transport is a dual element robot designed for minimum clearance and space and operates within a matching load lock chamber of minimum volume.

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Patent Owner(s)

  • BROOKS AUTOMATION, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Talmer, Mark A Westford, US 12 416

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