Semiconductor devices having spacer protection pattern

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United States of America Patent

PATENT NO 9859432
SERIAL NO

15245549

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Abstract

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A semiconductor device may include a pair of active patterns spaced apart from each other in a first direction, a pair of gate electrodes intersecting the pair of the active patterns in a second direction crossing the first direction, gate spacers on sidewalls of the pair of the active patterns, source/drain regions on the pair active patterns between the pair of the gate electrodes, and a spacer protection pattern between the pair of the gate electrodes and between the pair of the active patterns. The spacer protection pattern may be commonly connected to the gate spacers.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTD129 SAMSUNG-RO YEONGTONG-GU SUWON-SI GYEONGGI-DO 16677

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Hagju Seongnam-si, KR 17 73
Han, Jeongnam Seoul, KR 15 215
Ko, Yongsun Suwon-si, KR 33 215
Park, Byungjae Seongnam-si, KR 5 45
Park, Sangjine Suwon-si, KR 50 224

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