Method for planarizing one or more workpieces, a workpiece planarization arrangement, a chuck and a replaceable workpiece-support for a chuck

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United States of America Patent

PATENT NO 9862037
SERIAL NO

15065914

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Abstract

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According to various embodiments, a workpiece planarization arrangement may include: a chuck including a support carrier; and a workpiece-support replaceably mounted on the support carrier; and a planarization tool configured to planarize the at least one portion of the workpiece-support and to planarize one or more workpieces on the at least one portion of the workpiece-support.

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Patent Owner(s)

  • INFINEON TECHNOLOGIES AG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Binter, Alexander Villach, AT 7 5
Goller, Bernhard Villach, AT 59 190
Grindling, Christian Klagenfurt, AT 2 1
Muri, Ingo Villach, AT 42 34

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