High-resolution scanning microscopy

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United States of America Patent

PATENT NO 9864182
SERIAL NO

14489885

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Abstract

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A microscope and method for high resolution scanning microscopy of a sample, having: an illumination device for the purpose of illuminating the sample, an imaging device for the purpose of scanning at least one point or linear spot across the sample and of imaging the point or linear spot into a diffraction-limited, static single image below a reproduction scale in a detection plane. A detector device for detecting the single image in the detection plane for various scan positions is also provided. An evaluation device for the purpose of evaluating a diffraction structure of the single image for the scan positions is provided. The detector device has a detector array which has pixels and which is larger than the single image. At least one phase mask with a variable lateral profile of the phase influence is included in or near to the objective pupil, or in a plane which is conjugated to the objective pupil, for generating a spatial distribution of the illumination light and/or the detection light perpendicular to the optical axis, and/or in the direction of the optical axis.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS MICROSCOPY GMBH07745 JENA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kalkbrenner, Thomas Jena, DE 77 406
Kleppe, Ingo Jena, DE 56 485
Netz, Ralf Jena, DE 47 346
Novikau, Yauheni Jena, DE 32 205
Wolleschensky, Ralf Jena, DE 182 1791

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