Rare-earth oxide based erosion resistant coatings for semiconductor application

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United States of America Patent

PATENT NO 9865434
SERIAL NO

13954808

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Abstract

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An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 0 mol % to about 55 mol %, and Al2O3 in range between about 0 mol % to about 10 mol %. The ceramic coating may alternatively inculde Y2O3 in a range between about 30 mol % to about 60 mol %, ZrO2 in a range between about 0 mol % to about 20 mol %, and Al2O3 in a range between about 30 mol % to about 60 mol %.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Tom Los Altos, US 19 1933
Kanungo, Biraja P San Jose, US 52 1990
Sun, Jennifer Y Mountain View, US 254 11326

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