Integrated circuit comprising a gas sensor

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United States of America Patent

PATENT NO 9865647
SERIAL NO

15042011

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An integrated circuit and a method of making the same. The integrated circuit includes a semiconductor substrate having a major surface. The integrated circuit also includes a thermal conductivity based gas sensor having an electrically resistive sensor element located on the major surface for exposure to a gas to be sensed. The integrated circuit further includes a barrier located on the major surface for inhibiting a flow of the gas across the sensor element.

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Patent Owner(s)

  • AMS INTERNATIONAL AG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Daamen, Roel Herkenbosch, NL 46 371
Hoang, Viet Nguyen Leuven, BE 3 6
Humbert, Aurelie Brussels, BE 31 602

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