Recirculation substrate container purging systems

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United States of America Patent

PATENT NO 9868140
SERIAL NO

15095898

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Abstract

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Methods and systems to reduce the consumption of purge gas for semiconductor substrate containers. The recirculation purging system recycles purge gas back to substrate containers by filtering and purifying gas flow from substrate containers, receiving gas flow from load port, or including a recirculation tank.

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Patent Owner(s)

  • BROOKS AUTOMATION, INC.;BROOKS AUTOMATION (GERMANY) GMBH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Rebstock, Lutz Gaienhofen, DE 79 461

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