Chemical modification of hardmask films for enhanced etching and selective removal

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United States of America Patent

PATENT NO 9870915
SERIAL NO

15283400

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Abstract

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Embodiments include a method of processing a hardmask that includes forming an alloyed carbon hardmask over an underlying layer. In an embodiment, the alloyed carbon hardmask is alloyed with metallic-carbon fillers. The embodiment further includes patterning the alloyed carbon hardmask and transferring the pattern of the alloyed carbon hardmask into the underlying layer. According to an embodiment, the method may further include removing the metallic component of the metallic-carbon fillers from the alloyed carbon hardmask to form a porous carbon hardmask. Thereafter, the porous hardmask may be removed. In an embodiment, the metallic component of the metallic-carbon fillers may include flowing a processing gas into a chamber that volatizes the metallic component of the metallic-carbon fillers.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anthis, Jeffrey W San Jose, US 81 4123
Huang, Simon Campbell, US 43 291
Knapp, David Santa Clara, US 58 2006
Kraus, Philip Alan San Jose, US 2 0
Thompson, David San Jose, US 332 13667

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