Extreme ultraviolet light generation device

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United States of America Patent

PATENT NO 9872372
SERIAL NO

15379230

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Abstract

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An extreme ultraviolet light generation device is to generate extreme ultraviolet light by irradiating a target with a pulse laser beam and thereby turning the target into plasma. The device may include a chamber, a magnet configured to form a magnetic field in the chamber, and an ion catcher including a collision unit disposed so that ions guided by the magnetic field collide with the collision unit.

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Patent Owner(s)

Patent OwnerAddress
GIGAPHOTON INC400 OAZA YOKOKURASHINDEN OYAMA-SHI TOCHIGI 323-8558

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abe, Tamotsu Oyama, JP 53 878
Nagai, Shinji Oyama, JP 81 983
Ueda, Atsushi Oyama, JP 179 2488
Ueno, Yoshifumi Oyama, JP 69 678

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