Apparatus and method for nanoporous inorganic membranes and films, methods of making and usage thereof
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United States of America Patent
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Jan 23, 2018
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Aug 16, 2013
filing date -
Jun 17, 2009
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Abstract
A method for fabricating isolated pores in an inorganic membrane includes the steps of patterning the inorganic membrane to selectively expose a portion of the membrane, forming a plurality of tracks of material damage in the exposed portion of the inorganic membrane by irradiation with energetic ions, and chemically etching the track damaged material to define the pores through the inorganic membrane with a predetermined geometrically defined cross sectional shape and with a controlled diameter range from less than 1 nanometer and up to micrometer scale.
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