Ultrasonic transducer and method of manufacturing the same

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United States of America Patent

PATENT NO 9873136
SERIAL NO

14701580

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Abstract

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An ultrasonic transducer and a method of manufacturing the same are provided. The ultrasonic transducer includes a substrate, a first insulation layer, and a first thin film layer; a plurality of support members formed on the first thin film layer; a second thin film layer supported by the plurality of support members; a cavity between the first thin film layer and the second thin film layer; and a common ground electrode on the second thin film layer.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTDSUWON-SI GYEONGGI-DO 16677

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chung, Seokwhan Hwaseong-si, KR 26 108
Hong, Seogwoo Yongin-si, KR 77 151
Shim, Dongsik Hwaseong-si, KR 37 169

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