Gas enclosure systems and methods utilizing multi-zone circulation and filtration

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United States of America Patent

PATENT NO 9873273
SERIAL NO

15046381

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present teachings relate to various embodiments of a gas enclosure system that can have a particle control system that can include a multi-zone gas circulation and filtration system, a low-particle-generating X-axis linear bearing system for moving a printhead assembly relative to a substrate, a service bundle housing exhaust system, and a printhead assembly exhaust system. Various components of a particle control system can include a tunnel circulation and filtration system that can be in flow communication with bridge circulation and filtration system. Various embodiments of a tunnel circulation and filtration system can provide cross-flow circulation and filtration of gas about a floatation table of a printing system. Various embodiments of a gas enclosure system can have a bridge circulation and filtration system that can provide circulation and filtration of gas about a printing system bridge and related apparatuses and devices. Accordingly, various embodiments of a gas circulation and filtration system as disclosed herein can effectively remove both airborne particulate matter, as well as particulate matter generated proximal to a substrate during a printing process. As such, various embodiments of a gas circulation and filtration system in conjunction with various embodiments of a gas purification system of the present teachings can provide for a controlled manufacturing environment resulting in a high-yield of OLED various devices.

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Patent Owner(s)

  • KATEEVA, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iyengar, Prahallad Santa Clara, US 11 293
Ko, Alexander Sou-Kang Santa Clara, US 126 1090
Mauck, Justin Belmont, US 58 734
Pun, Digby San Jose, US 30 111
Vronsky, Eliyahu Los Altos, US 124 2453

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