Abrasive material, method for producing same, and abrasive slurry containing same

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United States of America Patent

PATENT NO 9873824
SERIAL NO

15021434

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Abstract

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A polishing material including polishing abrasive grains, the polishing abrasive grain having a core material that includes a metal oxide, and a cover layer that is provided on a surface of the core material and includes an oxide of a metal, that is different from the core material, or an oxide of a semimetal. When the polishing abrasive grains are observed with a scanning electron microscope after boiling a slurry including the polishing abrasive grains for 5 hours, a ratio of a longitudinal axis to a lateral axis of the polishing abrasive grain is 1.0 or greater and less than 1.5. The polishing abrasive grain preferably has a mass ratio of the cover layer to the core material, cover layer/core material, of from 0.3 mass % to 30 mass % inclusive. The cover layer preferably has a thickness of from 0.2 nm to 500 nm inclusive.

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Patent Owner(s)

  • MITSUI MINING & SMELTING CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Maruyama, Yohei Saitama, JP 9 23
Ogata, Sumikazu Tokyo, JP 5 54
Oshika, Motomi Saitama, JP 2 13
Tokuchi, Shigeki Saitama, JP 4 3

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