Three-dimensional coordinate measuring machine
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United States of America Patent
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Jan 23, 2018
Issued Date -
N/A
app pub date -
Aug 23, 2016
filing date -
Jul 7, 2014
priority date (Note) -
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Abstract
A three-dimensional coordinate measuring machine includes a base, a moving mechanism provided on the base, and a probe moved by the moving mechanism, the three-dimensional coordinate measuring machine measures coordinates of a surface position of an object to be measured by using the probe, the moving mechanism includes: a linear guide using a mechanical bearing; and an air bearing mechanism provided in parallel to the linear guide, one of ends of the moving part is attached to a linear moving unit that moves by the linear guide and the other is attached to the air moving part so that the other end can swing with respect to the air moving part, and the air bearing mechanism absorbs a difference in the height change between the linear guide and the air bearing mechanism by the air bearing.
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