Integrated time dependent dielectric breakdown reliability testing
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United States of America Patent
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Jan 23, 2018
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app pub date -
Sep 7, 2016
filing date -
Jun 22, 2012
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Abstract
Systems for reliability testing include a picometer configured to measure a leakage current across a device under test (DUT); a camera configured to measure optical emissions from the DUT based on a timing of the measurement of the leakage current; and a test system configured to apply a stress voltage to the DUT and to correlate the leakage current with the optical emissions using a processor to determine a time and location of a defect occurrence within the DUT by locating instances of increased noise in the leakage current that correspond in time with instances of increased optical emissions.
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