Integrated waveguide structure with perforated chip edge seal
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United States of America Patent
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Jan 23, 2018
Issued Date -
N/A
app pub date -
Oct 4, 2013
filing date -
Oct 4, 2013
priority date (Note) -
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Abstract
An integrated waveguide structure with perforated chip edge seal and methods of manufacture are disclosed herein. The structure includes a guard ring structure surrounding an active region of an integrated circuit chip. The structure further includes a gap in the guard ring structure which is located at a predetermined level of the integrated circuit chip. The structure further includes a waveguide structure formed on a substrate of the integrated circuit chip. The structure further includes a fiber optic optically coupled to the waveguide structure through the gap formed in the guard ring structure.
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