Three-dimensional (3D) ferroelectric dipole metal-oxide semiconductor ferroelectric field-effect transistor (MOSFeFET) system, and related methods and systems
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United States of America Patent
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Jan 23, 2018
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Apr 13, 2017
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Apr 13, 2017
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Abstract
A three-dimensional (3D) ferroelectric dipole metal-oxide semiconductor ferroelectric field-effect transistor (MOSFeFET) system, and related methods and systems are disclosed. The 3D ferroelectric dipole MOSFeFET system includes a bottom dielectric layer, a gate layer disposed above the bottom dielectric layer, and a top dielectric layer disposed on top of the gate layer. The 3D ferroelectric dipole MOSFeFET system also includes at least one source line (SL) line and at least one bit line (BL). At least one interconnect, which extends between the bottom dielectric layer and the top dielectric layer interconnects the at least one SL with the at least one BL. A ferroelectric dipole MOSFeFET(s) is formed at an intersection area of the at least one interconnect and the gate layer. The 3D ferroelectric dipole MOSFeFET system can lead to improved component density and reduced footprint.
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