Charged particle microscope with vibration detection / correction

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United States of America Patent

PATENT NO 9875879
APP PUB NO 20170125209A1
SERIAL NO

15243753

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of using a Charged Particle Microscope comprising:

    A specimen holder, connected to a positioning stage, for holding a specimen;A source, for producing a beam of charged particles;An illuminator, for directing said beam so as to irradiate the specimen;A detector, for detecting a flux of radiation emanating from the specimen in response to said irradiation,comprising the following steps:Providing the microscope with an interferential optical position sensor for determining a position of said specimen holder relative to a reference;Providing an automatic controller with a time-dependent position signal from said optical position sensor;Invoking said controller to use said signal to produce a vibration profile for the microscope.

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Patent Owner(s)

  • FEI COMPANY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
De, Boeij Jeroen 's-Hertogenbosch, NL 8 28
Van, den Oetelaar Johannes Antonius Maria Eindhoven, NL 4 30
Visscher, Albert Veldhoven, NL 12 97

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