Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods
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United States of America Patent
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Jan 23, 2018
Issued Date -
N/A
app pub date -
Dec 20, 2016
filing date -
Nov 19, 2013
priority date (Note) -
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Abstract
A control system that includes deflection sensors which can control clamping forces applied by electrostatic chucks, and related methods are disclosed. By using a sensor to determine a deflection of a workpiece supported by an electrostatic chuck, a control system may use the deflection measured to control a clamping force applied to the workpiece by the electrostatic chuck. The control system applies a clamping voltage to the electrostatic chuck so that the clamping force reaches and maintains a target clamping force. In this manner, the clamping force may secure the workpiece to the electrostatic chuck to enable manufacturing operations to be performed while preventing workpiece damage resulting from unnecessary higher values of the clamping force.
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