Plate, transducer and methods for making and operating a transducer

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United States of America Patent

PATENT NO 9876446
SERIAL NO

14962949

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Importance

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Abstract

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A plate, a transducer, a method for making a transducer, and a method for operating a transducer are disclosed. An embodiment comprises a plate comprising a first material layer comprising a first stress, a second material layer arranged beneath the first material layer, the second material layer comprising a second stress, an opening arranged in the first material layer and the second material layer, and an extension extending into opening, wherein the extension comprises a portion of the first material layer and a portion of the second material layer, and wherein the extension is curved away from a top surface of the plate based on a difference in the first stress and the second stress.

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Patent Owner(s)

Patent OwnerAddress
INFINEON TECHNOLOGIES AGAM CAMPEON 1-12 NEUBIBERG 85579

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dehe, Alfons Reutlingen, DE 163 2622

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