Table device and conveyance device
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United States of America Patent
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-
Jan 30, 2018
Issued Date -
N/A
app pub date -
Dec 18, 2013
filing date -
Jul 2, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A table device including a first member; a second member; a first guide device guiding the second member such that the second member is moved in a direction parallel to a first axis by movement of the first member; a table supported by the second member; a third member connected to at least a part of the table; a bearing member forming a gas bearing between the bearing member and the third member with a gas supplied between the bearing member and the third member, and movably supporting the third member in the direction parallel to the first axis; and a support device including a parallel pin that is arranged such that the parallel pin becomes parallel to the first axis, and connects the second member and the table, and supporting the table. The table is supported by the second member through the support device.
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