Stocker provided with purging functionality, stocker unit, and method for supplying cleaning gas
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United States of America Patent
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Jan 30, 2018
Issued Date -
N/A
app pub date -
Jun 21, 2013
filing date -
Aug 21, 2012
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A stocker includes cells including a purge function and cells not including the purge function. A cell not including the purge function is easily changed to a cell that includes the purge function. The stocker includes a frame to which multiple cell supports not including a cleaning gas supplying nozzle are configured to be attached along the vertical direction or the horizontal direction, and the base of a stocker unit is attached to the frame. The stocker unit includes a pipe configured to supply cleaning gas that is provided along the base, and multiple cell supports including the purge function that are attached to the base and are aligned along the vertical direction or the horizontal direction. Each cell support preferably is configured to support a container and includes a nozzle configured to supply cleaning gas from the pipe to the container.
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