High purity metallic top coat for semiconductor manufacturing components

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United States of America Patent

PATENT NO 9879348
SERIAL NO

15595888

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Abstract

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A component for a manufacturing chamber comprises a cold spray coating and an anodization layer on the cold spray coating. The anodization layer has a thickness of about 2-10 mil. The anodization layer comprises a low porosity bottom layer portion having a porosity that is less than about 40-50% and a porous columnar top layer portion having a porosity of about 40-40% and comprising a plurality of columnar nanopores having a diameter of about 10-50 nm.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Firouzdor, Vahid San Mateo, US 56 1463
Sun, Jennifer Y Mountain View, US 254 11326

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