Precision positioning device and stage incorporating a globoid worm and its manufacture
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United States of America Patent
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Jan 30, 2018
Issued Date -
N/A
app pub date -
Aug 18, 2015
filing date -
Aug 19, 2014
priority date (Note) -
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Abstract
The device is a precision motion right angle drive for use with linear and rotary stages which employs a combination of globoid worm and small diameter star gear. Coaxial with the star gear, on the same shaft, is a spur gear which drives the rotary stage gear or a linear rack. The thin star gear achieves meshing accuracy with the globoid worm permitting a large tooth angle for direct preloading without jamming. This gear combination eliminates backlash, allows a low gear ratio for low globoid worm speed, and enables the use of an ordinary spur gear to engage the stage gear without backdrive or backlash. Further, it allows for gear contact area to compensate for the thinness of the star gear. An embodiment including an integrated bearing rotary stage permits flexibility of application and avoidance of need for custom bearing designs by achieving high motion precision at low cost.
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