Edge crack detection system

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United States of America Patent

PATENT NO 9880220
SERIAL NO

15244142

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Abstract

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According to an exemplary embodiment, a method of detecting edge cracks in a die under test is provided. The method includes the following operations: receiving a command signal; providing power from the command signal; providing a response signal based on the command signal; and self-destructing based on the command signal.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Tsui-Mei Hsinchu, TW 11 15
Hsiao, Huang-Ting Taoyuan County, TW 6 21
Lu, Nai-Cheng Hsinchu County, TW 8 77
Tsai, Cheng-Hung Tainan, TW 57 812
Tsao, Pei-Haw Tai-chung, TW 109 1244
Xu, An-Tai Cupertino, US 5 17

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