Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists

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United States of America Patent

PATENT NO 9881823
SERIAL NO

14788464

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Abstract

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A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route.

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Patent Owner(s)

  • MURATA MACHINERY, LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Doherty, Brian J Weston, US 17 2369
Mariano, Thomas R Londonderry, US 10 214
Sullivan, Robert P Wilmington, US 28 392

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