Piezoelectric devices and methods for their preparation and use

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United States of America Patent

PATENT NO 9882116
SERIAL NO

15144585

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Abstract

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Methods for fabricating a piezoelectric device are provided. The methods can include providing a substrate and forming a nanocrystalline diamond layer on a first surface of the substrate. The methods can also include depositing a piezoelectric layer on a first surface of the nanocrystalline diamond layer.

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Patent Owner(s)

Patent OwnerAddress
INDIAN INSTITUTE OF TECHNOLOGY MADRASTHE DEAN INDUSTRIAL CONSULTANCY & SPONSORED RESEARCH [IC&SR] IIT PO CHENNAI TAMIL NADU 600036

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chandran, Maneesh Calicut, IN 2 1
Rao, M S Ramachandra Chennai, IN 4 2

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