Conditioned semiconductor system parts

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United States of America Patent

PATENT NO 9885117
SERIAL NO

14619474

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Abstract

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A method for conditioning a semiconductor chamber component may include passivating the chamber component with an oxidizer. The method may also include performing a number of chamber process operation cycles in a semiconductor processing chamber housing the chamber component until the process is stabilized. The number of chamber operation cycles to stabilize the process may be less than 10% of the amount otherwise used with conventional techniques.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Sung Je Santa Clara, US 22 1081
Lubomirsky, Dmitry Cupertino, US 306 29707

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