Rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow

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United States of America Patent

PATENT NO 9885123
SERIAL NO

13049763

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Abstract

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A system and methods are provided for low temperature, rapid baking to remove impurities from a semiconductor surface prior to in-situ deposition. The system is configured with an upper bank of heat elements perpendicular to the gas flow path, such that when the substrate is heated, the temperature across the substrate can be maintained relatively uniform via zoned heating. Advantageously, a short, low temperature process is suitable for advanced, high density circuits with shallow junctions. Furthermore, throughput is greatly improved by the low temperature bake.

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Patent Owner(s)

Patent OwnerAddress
ASM IP HOLDING B VVERSTERKERSTRAAT 8 ALMERE 1322 AP

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Halpin, Michael W Scottsdale, US 34 2853
Jacobson, Paul T Phoenix, US 6 388

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