Switching matrix and testing system for semiconductor characteristic measurement using the same
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United States of America Patent
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Feb 6, 2018
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N/A
app pub date -
Mar 21, 2012
filing date -
Oct 3, 2011
priority date (Note) -
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Abstract
A switching matrix includes a plurality of input ports, a plurality of output ports, a plurality of switching devices configured to open and close, an electrical connection between the input ports and the output ports, and an electrical sensor configured to generate a signal by measuring a predetermined electrical property of the electrical connection, the open and close of switching devices is pre-determined by status read from the electrical sensor.
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