Systems and methods of EUV mask cleaning

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9885952
APP PUB NO 20170031241A1
SERIAL NO

14811919

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Abstract

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A system includes a bracket that is configured to support a photomask and is located at a first side of the photomask; an acoustic energy generator configured to generate acoustic energy, wherein the acoustic energy includes mechanical vibrations of a megasonic frequency and wavelength; and a fluid dispenser coupled to the acoustic energy generator such that the acoustic energy generated by the acoustic energy generator is received by the fluid dispenser to generate an acoustically agitated fluid stream directed at a second side of the photomask, wherein the first side of the photomask is opposite a second side of the photomask, and wherein the first side includes a pattern.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDNO 8 LI-HSIN RD VI HSINCHU SCIENCE PARK HSINCHU 300

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lin, Kuan-Wen Taichung, TW 23 45
Lu, Chi-Lun Hsinchu, TW 42 245
Shen, Ching-Wei Hsinchu, TW 10 56

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