Systems for processing semiconductor devices, and methods of processing semiconductor devices

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United States of America Patent

PATENT NO 9888527
SERIAL NO

14155050

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Abstract

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Systems for processing semiconductor devices, and methods of processing semiconductor devices are disclosed. In some embodiments, a system for processing semiconductor devices includes a radiation energy source, a support, and a tool disposable between the support and the radiation energy source. The tool includes apertures adapted to retain a package component over the support. The system includes a cooling device proximate the support.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANYNO 8 LI-HSIN RD 6 SCIENCE-BASED INDUSTRIAL PARK HSIN-CHU 300-77

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ang, Ai-Tee Hsin-Chu, TW 27 224
Chen, Wei-Yu Taipei, TW 709 6443
Cheng, Ming-Da Jhubei, TW 447 4774
Lin, Hsiu-Jen Zhubei, TW 172 1408
Liu, Chung-Shi Hsin-Chu, TW 824 11367

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