Transmission system for transmitting pulse laser beam to extreme ultraviolet light chamber, and laser system

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United States of America Patent

PATENT NO 9888555
SERIAL NO

15422489

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Abstract

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The transmission system may include: an optical path adjustment device configured to substantially unify optical paths of a first pre-pulse laser beam and a second pre-pulse laser beam; an optical path separation device configured to separate the optical paths of the substantially unified first pre-pulse laser beam and the second pre-pulse laser beam to an optical path for the first pre-pulse laser beam and an optical path for the second pre-pulse laser beam; a first beam adjustment device disposed on the optical path for the first pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the first pre-pulse laser beam; and a second beam adjustment device disposed on the optical path for the second pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the second pre-pulse laser beam.

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Patent Owner(s)

Patent OwnerAddress
GIGAPHOTON INCTOCHIGI COUNTY JAPAN TOCHIGI

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ando, Masahiko Oyama, JP 166 2393
Suzuki, Toru Oyama, JP 255 2765
Ueno, Yoshifumi Oyama, JP 69 678

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