Control apparatus and control method

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United States of America Patent

PATENT NO 9888844
SERIAL NO

14592471

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Abstract

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A control apparatus includes an irradiation unit configured to irradiate a measurement object with a measuring beam, a restriction unit configured to restrict the measuring beam from being incident on the measurement object and to reflect or scatter the measuring beam, and a polarization control unit configured to control, based on the measuring beam reflected or scattered by the restriction unit, polarization of the measuring beam.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iwase, Yoshihiko Kyoto, JP 94 927
Kibe, Daisuke Chigasaki, JP 27 141
Makihira, Tomoyuki Tokyo, JP 68 831
Miyata, Kazuhide Yokohama, JP 50 426
Sato, Makoto Tokyo, JP 725 7901
Shinbata, Hiroyuki Tama, JP 81 533
Tomita, Ritsuya Kawasaki, JP 44 184

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