Apparatus for cleaning end surfaces of substrate
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United States of America Patent
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Feb 13, 2018
Issued Date -
N/A
app pub date -
Nov 30, 2015
filing date -
Nov 30, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An apparatus that cleans end surfaces of a substrate includes: a guide unit including a guide portion that has a channel, through which an end surface of a substrate passes, formed in a front surface thereof; and a brush with a front end whose position is controlled by a rear surface of the guide portion. The channel includes an opening that extends through the guide portion and the front end of the brush contacts an end surface of a substrate passing through the channel via the opening. The guide unit includes a concave portion in which at least the front end of the brush is housed and a suction hole that sucks dust from the concave portion.
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