Printhead with nanotips for nanoscale printing and manufacturing

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United States of America Patent

PATENT NO 9889653
SERIAL NO

14689361

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Abstract

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A nanoprinthead including an array of nanotip cantilevers, where each nanotip cantilever includes a nanotip at an end of a cantilever, and a method for forming the nanoprinthead. Each nanotip may be individually addressable through use of an array of piezoelectric actuators. Embodiments for forming a nanoprinthead including an array of nanotip cantilevers can include an etching process from a material such as a silicon wafer, or the formation of a metal or dielectric nanotip cantilever over a substrate. The nanoprinthead may operate to provide uses for technologies such as dip-pen nanolithography, nanomachining, and nanoscratching, among others.

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Patent Owner(s)

  • XEROX CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hays, Andrew W Fairport, US 53 393
Nystrom, Peter J Webster, US 124 1331
Sahu, Bijoyraj Portland, US 14 42

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