Spray assembly and wet etching device having the same
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United States of America Patent
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Feb 13, 2018
Issued Date -
N/A
app pub date -
Jul 8, 2015
filing date -
Jun 29, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
A spray assembly including a spray pipe with a bottom provided with a plurality of first through holes, each having a nozzle, wherein the nozzle includes a slider with an area larger than the first through hole, to cover the first through hole. The nozzle is connected to the slider and protrudes from the first through hole; the nozzle also includes a locking member to connect the slider to the spray pipe. The slider can move to adjust the position of the nozzle in the first through hole. There also provides a wet etching device including a spray unit, wherein the spray unit includes a plurality of spray assemblies as mentioned above, and a plurality of spray pipes in the plurality of spray assemblies are arranged in parallel with each other or approximately in parallel with each other.
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