Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9895723
SERIAL NO

15087699

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

In a gas purge apparatus, a load port apparatus, an installation stand for a purging container, and a gas purge method, the inside of the purging container is filled with a cleaning gas until just before transportation, and a placement failure does not happen to the next purging container to be placed. A purge nozzle is moved to a direction separating from a purge port after detecting a movement of a table on which the purging container is installed to an undock position and a stop of a feeding of the cleaning gas.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
TDK CORPORATION2-5-1 NIHONBASHI CHUO-KU TOKYO 1036128 ?1036128

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iwamoto, Tadamasa Tokyo, JP 20 119

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Aug 20, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Aug 20, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00