CMOS-MEMS structures with out-of-plane MEMS sensing gap

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United States of America Patent

PATENT NO 9896327
SERIAL NO

15158947

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Abstract

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A micro-electro-mechanical system sensor device is disclosed. The sensor device comprises a micro-electro-mechanical system (MEMS) layer, comprising: an actuator layer and a cover layer, wherein a portion of the actuator layer is coupled to the cover layer via a dielectric; and an out-of-plane sense element interposed between the actuator layer and the cover layer, wherein the MEMS device layer is connected to a complementary metal-oxide-semiconductor (CMOS) substrate layer via a spring and an anchor.

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Patent Owner(s)

  • INVENSENSE, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Thompson, Matthew Julian Beaverton, US 30 109

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