Inductively coupled plasma source with multiple dielectric windows and window-supporting structure

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United States of America Patent

PATENT NO 9896769
SERIAL NO

13666280

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Abstract

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A plasma reactor enclosure has a metallic portion and a dielectric portion of plural dielectric windows supported on the metallic portion, each of the dielectric windows extending around an axis of symmetry. Plural concentric coil antennas are disposed on an external side of the enclosure, respective ones of the coil antennas facing respective ones of the dielectric windows.

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Patent Owner(s)

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APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Agarwal, Ankur Fremont, US 85 1963
Balakrishna, Ajit Sunnyvale, US 60 1290
Buchberger,, Jr Douglas A Livermore, US 96 2969
Carducci, James D Sunnyvale, US 109 4234
Collins, Kenneth S San Jose, US 310 28285
Dorf, Leonid San Jose, US 74 1603
Fovell, Richard San Jose, US 43 1376
Kenney, Jason A Sunnyvale, US 22 832
Nguyen, Andrew San Jose, US 293 19285
Ramaswamy, Kartik San Jose, US 371 20119
Rauf, Shahid Pleasanton, US 151 5635

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