Method and system for quadrature error compensation

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United States of America Patent

PATENT NO 9897460
SERIAL NO

14733726

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Abstract

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The present invention concerns an MEMS sensor and a method for compensation of a quadrature error on an MEMS sensor, which is intended for detection of movements of a substrate, especially accelerations and/or rotation rates. At least one mass arranged on the substrate and mounted to move relative to it is driven by means of drive electrodes. The mass/es execute a movement deviating from the prescribed movement due to a quadrature error. A deflection of the mass/es occurring due to Coriolis force and quadrature error is detected with detection electrodes. It is proposed according to the invention that a capacitance change be detected as a function of drive movement of the mass/es by means of compensation electrodes. A compensation charge dependent on the quadrature error of the MEMS sensor is generated on the compensation electrodes. For compensation, the distorted or incorrect charge generated by the quadrature error in the detection electrodes is compensated with the compensation charge.

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Patent Owner(s)

  • MAXIM INTEGRATED PRODUCTS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Caminada, Carlo Pregnana Milanese, IT 39 661
Cazzaniga, Gabrielle Rosate, IT 1 1
Coronato, Luca Corsico, IT 60 934
Kondylis, Demetre Saratoga, US 3 14
Prandi, Luciano Bellinzago Novarese, IT 42 748
Santoro, Manuel Milan, IT 3 24

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