Processing apparatus and method of measuring temperature of workpiece in processing apparatus

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United States of America Patent

PATENT NO 9897489
SERIAL NO

14769306

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Abstract

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A processing apparatus and a method capable of accurately measuring a real temperature of a workpiece contained and heated in a chamber. The processing apparatus includes a chamber containing a workpiece, a measurement piece installed in the chamber, and a measuring unit. The measurement piece is capable of thermal expansion and contraction in response to an internal temperature of the chamber. The measuring unit measures a thermal expansion and contraction amount of the measurement piece to thereby measure the real temperature of the workpiece.

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Patent Owner(s)

  • KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.);KOBE STEEL, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujii, Hirofumi Takasago, JP 97 1018

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