Processing apparatus and method of measuring temperature of workpiece in processing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9897489
SERIAL NO

14769306

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A processing apparatus and a method capable of accurately measuring a real temperature of a workpiece contained and heated in a chamber. The processing apparatus includes a chamber containing a workpiece, a measurement piece installed in the chamber, and a measuring unit. The measurement piece is capable of thermal expansion and contraction in response to an internal temperature of the chamber. The measuring unit measures a thermal expansion and contraction amount of the measurement piece to thereby measure the real temperature of the workpiece.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL LTD )2-4 WAKINOHAMA-KAIGANDORI 2-CHOME CHUO-KU KOBE-SHI HYOGO 651-8585

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujii, Hirofumi Takasago, JP 90 841

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Aug 20, 2021
7.5 Year Payment $3600.00 $1800.00 $900.00 Aug 20, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Aug 20, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00