Stage positioning system and lithographic apparatus

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United States of America Patent

PATENT NO 9897926
SERIAL NO

15115876

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Abstract

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A stage positioning system, includes a first body, a second body and a coupling arranged to couple the first body and the second body to each other. The coupling includes a visco-elastic element arranged to couple the first body and the second body to each other. The stage positioning system may further include a sensor to provide a signal representative of a position of the first body. The stage positioning system may further include an actuator to move the first body. The second body may be arranged to couple the actuator and the coupling to each other.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aangenent, Wilhelmus Henricus Theodorus Maria Eindhoven, NL 14 59
Koorneef, Lucas Franciscus Eindhoven, NL 2 2
Ruijl, Theo Anjes Maria Eindhoven, NL 20 343
Van, Den Berg Stanley Constant Johannes Martinus Veldhoven, NL 1 2
Van, Der Meulen Stan Henricus Eindhoven, NL 6 9
Van, Eijk Jan Eindhoven, NL 38 648
Van, Lieshout Richard Henricus Adrianus Batenburg, NL 7 40
Wullms, Pieter Hubertus Godefrida Veldhoven, NL 1 2

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