Mass flow controller for improved performance across fluid types
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United States of America Patent
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Feb 20, 2018
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app pub date -
Aug 27, 2015
filing date -
Mar 1, 2013
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Abstract
Mass flow controllers and methods for improving the control of a flow of a variety of fluid types are described. The method includes selecting a process gas type for the process gas that will be controlled and obtaining molecular mass information for the selected processed gas type. General characterization data is obtained that includes, for each of a plurality of flow and pressure value pairs, a corresponding control signal value and operating characterization data is generated by modifying the flow values in the general characterization data based upon the molecular mass for the selected process gas type. The operating characterization data is then used to operate a valve of the mass flow controller in open loop control mode.
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