Method for analyzing evolved gas and evolved gas analyzer

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United States of America Patent

PATENT NO 9899198
SERIAL NO

15356581

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Disclosed herein is a method for analyzing evolved gas and an evolved gas analyzer, the method correcting detection sensitivity differences in analysis devices, day-to-day variations thereof, thereby quantifying a measurement target with high accuracy. The method for analyzing evolved gas of the apparatus including: a sample holder; a heating unit evolving a gas component; an ion source generating ions by ionizing the gas component; a mass spectrometer detecting the gas component; and a gas channel through which mixed gas flows, the method including: operating a discharged flow rate controlling process of controlling a flow rate of the mixed gas discharged to outside; operating a sample holder cooling process of cooling the sample holder by bringing the sample holder into contact with a cooling unit; and operating a correction process including: correcting a mass spectrum position; calculating a sensitivity correction factor; and calculating a heating correction factor.

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Patent Owner(s)

  • HITACHI HIGH-TECH SCIENCE CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akiyama, Hideyuki Tokyo, JP 19 61
Maruoka, Kantaro Tokyo, JP 12 122
Takeuchi, Toshitada Tokyo, JP 6 21
Watanabe, Masafumi Tokyo, JP 67 585
Yamada, Kentaro Tokyo, JP 90 979

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