Use of vacuum chucks to hold a wafer or wafer sub-stack

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United States of America Patent

PATENT NO 9899251
SERIAL NO

15698991

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Abstract

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Techniques are described for holding a wafer or wafer sub-stack to facilitate further processing of the wafer of sub-stack. In some implementations, a wafer or wafer sub-stack is held by a vacuum chuck in a manner that can help reduce bending of the wafer or wafer sub-stack.

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Patent Owner(s)

Patent OwnerAddress
FOCUSLIGHT SINGAPORE PTE LTDTHE PLAZA 199591

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Heimgartner, Stephan Passugg, CH 31 290
Rudmann, Hartmut Jona, CH 127 1092
Vidallon, John A Singapore, SG 9 67

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