Method for protecting layer by forming hydrocarbon-based extremely thin film

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United States of America Patent

PATENT NO 9899291
SERIAL NO

14798136

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Abstract

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A method for protecting a layer includes: providing a substrate having a target layer and forming a protective layer on the target layer, said protective layer contacting and covering the target layer and containing a hydrocarbon-based layer constituting at least an upper part of the protective layer, which hydrocarbon-based layer is formed by plasma-enhanced atomic layer deposition (PEALD) using an alkylaminosilane precursor and a noble gas without a reactant.

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Patent Owner(s)

  • ASM IP HOLDING B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kato, Richika Tokorozawa, JP 3 1033
Nakano, Akinori Tokyo, JP 16 3596
Namba, Kunitoshi Machida, JP 28 9506
Nonaka, Yuya Kawasaki, JP 6 1697
Okuro, Seiji Sagamihara, JP 1 694

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