Electronic grade glass substrate and making method

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United States of America Patent

PATENT NO 9902037
SERIAL NO

14931610

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Abstract

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An electronic grade glass substrate is provided with a recess, channel or step in one surface, and a first chamfer between the side surface of the recess, channel or step and the one surface. The side and bottom surfaces of the recess, channel or step are mirror finished, and the first chamfer is mirror finished.

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Patent Owner(s)

Patent OwnerAddress
SHIN-ETSU CHEMICAL CO LTD6-1 OHTEMACHI 2-CHOME CHIYODA-KU TOKYO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Okafuji, Daiyu Joetsu, JP 11 33
Takeuchi, Masaki Joetsu, JP 174 1242
Yamazaki, Hiroyuki Joetsu, JP 183 1751

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