Roller assembly, step roller thereof, and method for transporting substrate using the same
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United States of America Patent
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Feb 27, 2018
Issued Date -
N/A
app pub date -
Dec 26, 2016
filing date -
Dec 26, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
A roller assembly for transporting a substrate includes a step roller, a first transport roller, and a second transport roller. The step roller includes a main roller, an air cylinder, and a pair of edge rollers. The air cylinder is sleeved on the main roller, and includes a plurality of air jetting holes and a plurality of air suction holes. The edge rollers are disposed on the main roller and are located on opposite ends of the air cylinder. The first transport roller and the second transport roller are disposed on opposite sides of the step roller, wherein the substrate is transported from the first transport roller to the second transport roller through the step roller. A method using the same is also provided.
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